Products
Equipment Products
Semiconductor Equipment

Wafer Laser Grooving System

設備特點
利用雷射對晶圓切割道(Scribe line)進行開槽。針對帶有 Low-k 膜層的晶圓,傳統刀輪切割易產生脫層(Delamination)問題;透過雷射開槽可有效抑制脫層,實現高質量加工。設備相容 Low-k、CMOS 等半導體晶圓產品之自動化作業。
產品型號 |
JBL-LGV系列
應用簡介 |                   
雷射開槽
設備特點 |  
針對帶有 Low-k 膜層的晶圓,傳統刀輪切割易產生脫層(Delamination)問題;透過雷射開槽可有效抑制脫層,實現高質量加工。
設備規格 |
雷射類型

納秒

 (Nanosecond)


皮秒

(Picosecond)


飛秒

 (Femtosecond)


雷射功率

>15W

>30W

>30W

雷射波長

355nm

光斑寬度

Narrow: 8um

Wide:20-90um

Narrow: 8um

Wide: 15-90um

Narrow: 8um

Wide: 15-90um

開槽速度

0-1000mm/s

開槽深度

>10μm

碎屑堆積5μm

2μm

1μm


效果 |






A demo machine is available on-site. For inquiries, please contact Chengbo Laser.
Schedule a Machine Viewing
FAQ
Q&A
Q
Will there be smoke or odor during the laser marking process? How is it handled?
A
Some materials may generate a small amount of smoke or odor during laser marking, especially when using a CO₂ laser on materials such as wood or leather. We recommend customers use a dedicated laser fume extractor, which efficiently filters smoke and odors, keeping the workspace clean and maintaining air quality to ensure the health of operators.
A
The price of a laser marking machine varies depending on the laser type, power, configuration, and functions (such as whether it includes an automation system or vision positioning). Prices typically range from several hundred thousand to over one million NTD. Standard configurations usually include the main unit, control software, computer (optional), fixtures (optional), installation, and training. We will provide a detailed quotation based on your specific requirements.
A
The primary difference between laser welding and traditional welding lies in the heat source and energy density. Laser welding offers high energy density, low heat input, fast welding speed, minimal thermal deformation, narrow and deep weld seams, no need for filler material (in certain cases), and the ability to weld difficult-to-weld materials. Traditional welding, on the other hand, often results in a larger heat-affected zone, more noticeable deformation, and slower speed.
A
The choice of laser welding machine power depends on the type of material, thickness, required welding depth, and welding speed. Generally, higher power allows for processing thicker materials, achieving deeper welds, and welding at faster speeds. Common power ranges from several hundred watts to several kilowatts.Jumbo provides testing services and can recommend the most suitable power level based on your specific needs.
A
Our equipment is designed with user-friendliness in mind, featuring an intuitive and simple interface. We provide detailed operation manuals and on-site training, enabling general technicians to operate the machine after instruction. Jumbo also offers fixture design and automation design services to reduce labor requirements.
A

To help you make the best choice, we need to understand your welding requirements in detail, including:

  1. Type and thickness of materials

  2. Desired welding depth and width

  3. Daily or monthly production capacity requirements

  4. Existing production line setup

  5. Specific requirements for welding quality, precision, and efficiency

  6. Budget range

Based on this information, Jumbo professional team will recommend the most suitable equipment and configuration for you.