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Wafer EMC Grooving System

設備特點
利用雷射對晶圓上大尺寸晶片應力集中的四角位置進行溝槽加工,阻斷應力延伸,解決晶片因應力集中導致模封開裂的問題。
設備同時具備鍵合晶圓 (Bonded Wafer)在解鍵合 (De-bonding)之前的Edge Trim (邊緣修整)製程。
產品型號 |  
JBL-AWT系列
應用簡介 |             
EMC開槽、Edge trim
設備特點 |  
利用雷射對晶圓上大尺寸晶片應力集中的四角位置進行溝槽加工,阻斷應力延伸,解決晶片因應力集中導致模封開裂的問題。
設備規格 雷射類型 : UV
加工材料 : EMC、矽 (Si)、聚醯亞胺 (PI) 等
晶圓厚度 :≥200μm
加工能力 :加工後無微裂痕 (Crack)、無凸點殘留,不影響 HBM
加工精度 : EMC開槽:公差≤±20μm,目標值80~120μm邊緣修整:公差≤±30μm
晶圓翹曲 : 厚度200-1000μm,翹曲≤5mm / 厚度1000-2000μm,翹曲≤3mm
錐度要求 :加工400μm 深度的孔型,上下孔尺寸差≤100μm (D1-D2≤100μm)
上料模組 :Bare wafer Load Port×2
設備附加能力 :塗佈功能 二流體清洗
通訊協定: SECS/GEM
效果 |



A demo machine is available on-site. For inquiries, please contact Chengbo Laser.
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FAQ
Q&A
Q
Will there be smoke or odor during the laser marking process? How is it handled?
A
Some materials may generate a small amount of smoke or odor during laser marking, especially when using a CO₂ laser on materials such as wood or leather. We recommend customers use a dedicated laser fume extractor, which efficiently filters smoke and odors, keeping the workspace clean and maintaining air quality to ensure the health of operators.
A
The price of a laser marking machine varies depending on the laser type, power, configuration, and functions (such as whether it includes an automation system or vision positioning). Prices typically range from several hundred thousand to over one million NTD. Standard configurations usually include the main unit, control software, computer (optional), fixtures (optional), installation, and training. We will provide a detailed quotation based on your specific requirements.
A
The primary difference between laser welding and traditional welding lies in the heat source and energy density. Laser welding offers high energy density, low heat input, fast welding speed, minimal thermal deformation, narrow and deep weld seams, no need for filler material (in certain cases), and the ability to weld difficult-to-weld materials. Traditional welding, on the other hand, often results in a larger heat-affected zone, more noticeable deformation, and slower speed.
A
The choice of laser welding machine power depends on the type of material, thickness, required welding depth, and welding speed. Generally, higher power allows for processing thicker materials, achieving deeper welds, and welding at faster speeds. Common power ranges from several hundred watts to several kilowatts.Jumbo provides testing services and can recommend the most suitable power level based on your specific needs.
A
Our equipment is designed with user-friendliness in mind, featuring an intuitive and simple interface. We provide detailed operation manuals and on-site training, enabling general technicians to operate the machine after instruction. Jumbo also offers fixture design and automation design services to reduce labor requirements.
A

To help you make the best choice, we need to understand your welding requirements in detail, including:

  1. Type and thickness of materials

  2. Desired welding depth and width

  3. Daily or monthly production capacity requirements

  4. Existing production line setup

  5. Specific requirements for welding quality, precision, and efficiency

  6. Budget range

Based on this information, Jumbo professional team will recommend the most suitable equipment and configuration for you.